{"id":334,"date":"2025-03-18T17:06:55","date_gmt":"2025-03-18T09:06:55","guid":{"rendered":"https:\/\/blog.keruone.cn\/?p=334"},"modified":"2025-03-18T17:29:02","modified_gmt":"2025-03-18T09:29:02","slug":"paper-analysis_-high-sensitivity-micro-fiber-fabry-perot-pressure-sensor-based-on-silicon-mems-technology","status":"publish","type":"post","link":"https:\/\/blog.keruone.cn\/index.php\/2025\/03\/18\/paper-analysis_-high-sensitivity-micro-fiber-fabry-perot-pressure-sensor-based-on-silicon-mems-technology\/","title":{"rendered":"\u8bba\u6587\u5206\u6790\uff1a\u57fa\u4e8e\u7845 MEMS \u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668"},"content":{"rendered":"<h1>\u57fa\u4e8e\u7845 MEMS \u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668\ud83c\udf9b\ufe0f\ud83d\udce1<\/h1>\n<blockquote><p>\n  <em>[1]\u674e\u6587\u8c6a,\u8d3e\u5e73\u5c97,\u738b\u519b,\u7b49.\u57fa\u4e8e\u7845MEMS\u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668[J].\u5149\u5b50\u5b66\u62a5,2024,53(05):154-162.<\/em>\n<\/p><\/blockquote>\n<p>\u64b0\u5199\u8005\uff1a<strong><em>Keruone<\/em><\/strong><\/p>\n<p>\u65e5\u671f\uff1a \ud83d\uddd3\ufe0f2025-3-15<br \/>\n<\/br><br \/>\n<strong><em>\u5982\u679c\u4f60\u53d1\u73b0md\u89e3\u6790\u6709\u95ee\u9898\uff0c\u53ef\u4ee5\u5728\u8fd9\u91cc\u8fdb\u884c<\/em><\/strong><a href=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/README.html\" target=\"_blank\">html\u4e0b\u8f7d<\/a><\/p>\n<hr \/>\n<p>\u76ee\u5f55\uff1a<br \/>\n&#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#\u57fa\u4e8e\u7845-mems-\u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668\ufe0f\">\u57fa\u4e8e\u7845 MEMS \u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668\ud83c\udf9b\ufe0f\ud83d\udce1<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#0-\u9898\u76ee\u5206\u6790\">0. \u9898\u76ee\u5206\u6790\ud83e\uddd0\ud83d\udcd6<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#1-\u6458\u8981\u5206\u6790\ufe0f\">1. \u6458\u8981\u5206\u6790\u270d\ufe0f\ud83d\udcc4<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#2-\u5f15\u8a00\u5206\u6790\">2. \u5f15\u8a00\u5206\u6790\ud83d\udcda\ud83d\udd2c<\/a><br \/>\n    &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#21-\u5e94\u7528\u80cc\u666f\">2.1. \u5e94\u7528\u80cc\u666f<\/a><br \/>\n    &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#22-\u5149\u7ea4\u538b\u529b\u4f20\u611f\u5668\u53d1\u5c55\">2.2. \u5149\u7ea4\u538b\u529b\u4f20\u611f\u5668\u53d1\u5c55<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#3-\u4f20\u611f\u5668\u8bbe\u8ba1\u6cd5\u5e03\u91cc-\u73c0\u7f57\ufe0f\ufe0f\">3. \u4f20\u611f\u5668\u8bbe\u8ba1\uff08\u6cd5\u5e03\u91cc-\u73c0\u7f57\uff09\ud83c\udfd7\ufe0f\ud83c\udf9b\ufe0f<\/a><br \/>\n    &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#31-\u4f20\u611f\u5668\u7cfb\u7edf\u7ec4\u6210\">3.1. \u4f20\u611f\u5668\u7cfb\u7edf\u7ec4\u6210<\/a><br \/>\n    &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#32-\u4f20\u611f\u5668\u539f\u4ef6\u7ed3\u6784\">3.2 \u4f20\u611f\u5668\u539f\u4ef6\u7ed3\u6784<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#4-\u4f20\u611f\u5668\u5236\u5907mems\">4. \u4f20\u611f\u5668\u5236\u5907\uff08MEMS\uff09\ud83c\udfed\ud83d\udd2c<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#5-\u4f20\u611f\u5668\u6d4b\u8bd5\">5. \u4f20\u611f\u5668\u6d4b\u8bd5\ud83e\uddea\ud83d\udcca<\/a><br \/>\n    &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#51-\u89e3\u8c03\u65b9\u6cd5\">5.1 \u89e3\u8c03\u65b9\u6cd5<\/a><br \/>\n    &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#52-\u4f20\u611f\u5668\u9759\u6001\u6d4b\u8bd5\">5.2 \u4f20\u611f\u5668\u9759\u6001\u6d4b\u8bd5<\/a><br \/>\n      &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#521-\u6d4b\u8bd5\u5e73\u53f0\">5.2.1 \u6d4b\u8bd5\u5e73\u53f0<\/a><br \/>\n      &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#522-\u7a33\u5b9a\u6027\u6d4b\u8bd5\">5.2.2 \u7a33\u5b9a\u6027\u6d4b\u8bd5<\/a><br \/>\n      &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#523-\u7075\u654f\u5ea6\u6d4b\u8bd5\">5.2.3 \u7075\u654f\u5ea6\u6d4b\u8bd5<\/a><br \/>\n      &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#524-\u8fdf\u6ede\u91cd\u590d\u6027\u6d4b\u8bd5\">5.2.4 \u8fdf\u6ede\u91cd\u590d\u6027\u6d4b\u8bd5<\/a><br \/>\n      &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#525-\u6db2\u4f53\u73af\u5883\u4e2d\u7684\u6e29\u5ea6\u4ea4\u53c9\u7075\u654f\u5ea6\">5.2.5 \u6db2\u4f53\u73af\u5883\u4e2d\u7684\u6e29\u5ea6\u4ea4\u53c9\u7075\u654f\u5ea6<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#6-\u7ed3\u8bba\">6. \u7ed3\u8bba\u2705\ud83d\udccc<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#7-\u53ef\u80fd\u7f3a\u5c11\u7684-\">7. \u53ef\u80fd\u7f3a\u5c11\u7684\uff1f \ud83e\udd14\u2753<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#8-\u4ec0\u4e48\u662f\u79d1\u7814\u5bf9\u79d1\u7814\u7684\u63a2\u8ba8\">8. \u4ec0\u4e48\u662f\u79d1\u7814\uff1f\u2014\u2014\u5bf9\u79d1\u7814\u7684\u63a2\u8ba8\ud83c\udf93\ud83d\udd0d<\/a><br \/>\n  &#8211; <a class=\"wp-editor-md-post-content-link\" href=\"#\u53c2\u8003\u8bba\u6587\u7f51\u5740\">\u53c2\u8003\u8bba\u6587\\&amp;\u7f51\u5740\ud83d\udcd6\ud83d\udd17<\/a><\/p>\n<hr \/>\n<h2>0. \u9898\u76ee\u5206\u6790\ud83e\uddd0\ud83d\udcd6<\/h2>\n<p>\u6211\u4eec\u4ece\u9898\u76ee\u4e2d\u80fd\u591f\u8bfb\u5230\u4ec0\u4e48\uff1f<br \/>\n&#8211; \u8bbe\u8ba1\u5bf9\u8c61\uff1a<strong>\u538b\u529b\u4f20\u611f\u5668<\/strong><br \/>\n&#8211; \u4f7f\u7528\u6280\u672f\uff1a<br \/>\n  &#8211; \u7845MEMS\u6280\u672f\uff08\u7528\u4e8e\u5236\u4f5c\uff09<\/p>\n<blockquote>\n<ul>\n<li>MEMS\u662fMicro Electro Mechanical Systems\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u7684\u7f29\u5199\uff0c\u5177\u6709\u5fae\u5c0f\u7684\u7acb\u4f53\u7ed3\u6784\uff08\u4e09\u7ef4\u7ed3\u6784\uff09\uff0c\u662f\u5904\u7406\u5404\u79cd\u8f93\u5165\u3001\u8f93\u51fa\u4fe1\u53f7\u7684\u7cfb\u7edf\u7684\u7edf\u79f0\u3002<\/li>\n<li>MEMS \u8bbe\u5907\u4e0d\u4ec5\u4ec5\u662f\u5355\u4e00\u7684\u4f20\u611f\u5668\uff0c\u800c\u662f\u4e00\u4e2a\u5b8c\u6574\u7684\u5fae\u673a\u7535\u7cfb\u7edf\uff0c<strong>\u53ef\u4ee5\u5b8c\u6210\u4fe1\u53f7\u7684\u611f\u77e5\u3001\u8f6c\u6362\u3001\u5904\u7406\u548c\u54cd\u5e94<\/strong>\uff0c\u6240\u4ee5\u88ab\u7edf\u79f0\u4e3a\u201c\u5904\u7406\u5404\u79cd\u8f93\u5165\u3001\u8f93\u51fa\u4fe1\u53f7\u7684\u7cfb\u7edf\u201d\u3002<br \/>\n  > \u4f8b\u5b50\uff1a<br \/>\n  > &#8211; \u8f93\u5165\u4fe1\u53f7\uff1aMEMS \u8bbe\u5907\u53ef\u4ee5\u63a5\u6536\u7269\u7406\u4e16\u754c\u7684\u5404\u79cd\u4fe1\u53f7\uff0c\u6bd4\u5982\u538b\u529b\u3001\u52a0\u901f\u5ea6\u3001\u89d2\u901f\u5ea6\u3001\u6e29\u5ea6\u3001\u5149\u3001\u7535\u573a\u7b49\u3002\u4f8b\u5982\uff0cMEMS \u4f20\u611f\u5668\u53ef\u4ee5\u68c0\u6d4b\u5916\u90e8\u73af\u5883\u7684\u53d8\u5316\uff08\u5982\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u611f\u77e5\u8fd0\u52a8\uff09\u3002<br \/>\n  > &#8211; \u8f93\u51fa\u4fe1\u53f7\uff1aMEMS \u8bbe\u5907\u53ef\u4ee5\u5c06\u8fd9\u4e9b\u7269\u7406\u4fe1\u53f7\u8f6c\u6362\u4e3a\u7535\u4fe1\u53f7\u3001\u673a\u68b0\u52a8\u4f5c\u6216\u5176\u4ed6\u5f62\u5f0f\u7684\u4fe1\u53f7\u3002\u4f8b\u5982\uff0cMEMS \u9640\u87ba\u4eea\u4f1a\u8f93\u51fa\u7535\u4fe1\u53f7\uff0c\u4f20\u8f93\u7ed9\u5904\u7406\u5355\u5143\u3002<br \/>\n  <div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u57fa\u672c\u7684MEMS\u5de5\u827a.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u57fa\u672c\u7684MEMS\u5de5\u827a.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u57fa\u672c\u7684MEMS\u5de5\u827a\" \/><\/div><br \/>\n  <a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/zhuanlan.zhihu.com\/p\/412962981\">MEMS\u539f\u7406<\/a><\/li>\n<\/ul>\n<\/blockquote>\n<ul>\n<li>\u6cd5\u5e03\u91cc-\u73c0\u7f57\u5e72\u6d89\uff08\u7528\u4e8e\u68c0\u6d4b\u538b\u529b\uff09<br \/>\n> &#8211; \u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u5e72\u6d89\u6280\u672f\u5229\u7528\u5149\u7ea4\u4e2d\u7684\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8154\uff08Fabry-Perot Cavity\uff09\u6765\u68c0\u6d4b\u538b\u529b\u53d8\u5316\uff08\u900f\u955c\u662f\u7528\u6765\u5c06\u5149\u675f\u805a\u5408\uff0c\u5f62\u6210\u5e72\u4e8b\uff09\u3002\u5f53<strong>\u5916\u754c\u538b\u529b<\/strong>\u4f5c\u7528\u4e8e\u5149\u7ea4\u65f6\uff0c<strong>\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8154<\/strong>\u7684<strong>\u957f\u5ea6\u6216\u6298\u5c04\u7387<\/strong>\u4f1a\u53d1\u751f<strong>\u53d8\u5316<\/strong>\uff0c\u5bfc\u81f4\u5149\u7a0b\u5dee\u7684\u53d8\u5316\uff08<strong>\u5f71\u54cd\u5e72\u6d89<\/strong>\uff09\uff0c\u5bfc\u81f4<strong>\u5e72\u6d89\u5149\u8c31\u7684\u79fb\u52a8<\/strong>\u3002<strong>\u901a\u8fc7\u5206\u6790\u5e72\u6d89\u5149\u8c31\u7684\u53d8\u5316\uff0c\u53ef\u4ee5\u7cbe\u786e\u6d4b\u91cf\u538b\u529b\u3002<\/strong><br \/>\n> &#8211; \u8fd9\u79cd\u6280\u672f\u5177\u6709\u9ad8\u7075\u654f\u5ea6\u3001\u6297\u7535\u78c1\u5e72\u6270\u548c\u9002\u7528\u4e8e\u6076\u52a3\u73af\u5883\u7b49\u4f18\u70b9\uff0c\u5e38\u7528\u4e8e\u9ad8\u7cbe\u5ea6\u538b\u529b\u6d4b\u91cf\u3002<br \/>\n>> \u4f8b\u5b50\uff1a<br \/>\n>> &#8211; \u8f93\u5165\u4fe1\u53f7\uff1a\u5916\u754c\u538b\u529b\u4f5c\u7528\u4e8e\u5149\u7ea4\uff0c\u5bfc\u81f4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8154\u7684\u5149\u5b66\u7279\u6027\u53d1\u751f\u53d8\u5316\u3002<br \/>\n>> &#8211; \u8f93\u51fa\u4fe1\u53f7\uff1a\u5e72\u6d89\u5149\u8c31\u7684\u79fb\u52a8\u88ab\u68c0\u6d4b\u5e76\u8f6c\u6362\u4e3a\u7535\u4fe1\u53f7\uff0c\u7528\u4e8e\u538b\u529b\u6d4b\u91cf\u3002<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6cd5\u5e03\u91cc-\u73c0\u7f57\u539f\u7406.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6cd5\u5e03\u91cc-\u73c0\u7f57\u539f\u7406.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u6cd5\u5e03\u91cc-\u73c0\u7f57\u539f\u7406\u793a\u610f\u56fe\" \/><\/div><br \/>\n<a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/zhuanlan.zhihu.com\/p\/579184206\">\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8c10\u632f\u8154\u5de5\u4f5c\u539f\u74061<\/a><br \/>\n<a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/www.zhihu.com\/question\/56707047\">\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8c10\u632f\u8154\u5de5\u4f5c\u539f\u74062<\/a><\/li>\n<li>\u5149\u7ea4\uff08\u4f20\u8f93\u4fe1\u606f\uff09\n<ul>\n<li>\u8bbe\u5907\u7279\u70b9\uff1a\u9ad8\u7075\u654f\u5ea6\u3001\u5fae\u578b<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>1. \u6458\u8981\u5206\u6790\u270d\ufe0f\ud83d\udcc4<\/h2>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6458\u8981.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6458\u8981.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u6458\u8981\" \/><\/div><\/p>\n<p>\u672c\u6587\u6240\u4f5c\u5de5\u4f5c\uff1a<br \/>\n&#8211; \u8bbe\u8ba1\u5236\u5907\u4e00\u79cd\u5fae\u578b\u5316\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u4f20\u611f\u5668<br \/>\n&#8211; \u91c7\u7528\u6fc0\u5149\u7cbe\u7ec6\u5207\u5272\u6280\u672f\u5bf9\u4f20\u611f\u5668\u5355\u5143\u8fdb\u884c\u72ec\u7acb\u5206\u79bb<br \/>\n&#8211; \u642d\u5efa\u4e86\u4fe1\u53f7\u89e3\u8c03\u5b9e\u9a8c\u5e73\u53f0\uff0c\u5e76\u5bf9\u4f20\u611f\u5668\u7684\u611f\u538b\u7279\u6027\u8fdb\u884c\u4e86\u8be6\u5c3d\u6d4b\u8bd5<\/p>\n<p>\u4f20\u611f\u5668\u6027\u80fd\uff08\u5728 0~50 kPa \u7684\u538b\u529b\u8303\u56f4\u5185\uff09\uff1a<br \/>\n  &#8211; \u4f20\u611f\u5668\u7684\u538b\u529b\u7075\u654f\u5ea6\u53ef\u8fbe\u523018.5 nm\/kPa<br \/>\n  &#8211; \u6700\u5927\u975e\u7ebf\u6027\u5ea6\u4e3a 0.47%<br \/>\n  &#8211; \u91cd\u590d\u6027\u4e3a 0.18%<br \/>\n  &#8211; \u8fdf\u6ede\u4e3a 0.18%<\/p>\n<p>\u9664\u4e0a\u8ff0\u7279\u70b9\u5916\uff0c\u53d1\u73b0\u8fd8\u5177\u6709<strong>\u53ef\u6279\u91cf\u5236\u9020<\/strong>\u3001\u4f53\u79ef\u5c0f\u3001\u7075\u654f\u5ea6\u9ad8\u3001\u7535\u78c1\u517c\u5bb9\u3001\u751f\u7269\u517c\u5bb9\u4ee5\u53ca\u7a33\u5b9a\u6027\u5f3a\u7684\u7279\u70b9\u3002<\/p>\n<blockquote><p>\n  <strong>\u4e13\u6709\u540d\u8bcd\u89e3\u6790\uff1a<\/strong><br \/>\n  &#8211; <strong>SOI<\/strong>\uff1a\u5168\u79f0\u4e3aSilicon-On-Insulator\uff0c\u5373\u7edd\u7f18\u886c\u5e95\u4e0a\u7684\u7845\uff0c\u8be5\u6280\u672f\u662f\u5728\u9876\u5c42\u7845\u548c\u80cc\u886c\u5e95\u4e4b\u95f4\u5f15\u5165\u4e86\u4e00\u5c42\u57cb\u6c27\u5316\u5c42\u3002<br \/>\n  &#8211; <strong>BF33\u73bb\u7483<\/strong>\uff1a\u9ad8\u787c\u7845bf33\u73bb\u7483\u3002\u73bb\u7483\u6709\u79cd\u7279\u6027\uff0c\u88ab\u9ad8\u80fd\u8f90\u5c04\u540e\u4f1a\u53d1\u51fa\u7535\u78c1\u8f90\u5c04\uff0c\u8fd9\u79cd\u6027\u80fd\u88ab\u79f0\u4e3a\u8367\u5149\u53cd\u5e94\u3002\u8367\u5149\u53d6\u51b3\u4e8e\u6750\u6599\u7684\u7eaf\u5ea6\u3001\u7ed3\u6784\u7279\u6027\u3001\u8f90\u5c04\u7684\u80fd\u91cf\u548c\u6fc0\u53d1\u6ce2\u957f\uff0c\u6bd4\u8d77\u94a0\u9499\u73bb\u7483\uff0c\u9ad8\u787c\u7845\u7684\u8367\u5149\u73b0\u8c61\u8fdc\u8fdc\u4f4e\u4e8e\u94a0\u9499\u5e73\u677f\u73bb\u7483\u3002\u6240\u4ee5\u5728\u67d0\u4e9b\u6210\u5206\u68c0\u6d4b\u6216\u662f\u751f\u7269\u9886\u57df\uff0c\u8981\u51cf\u5c11\u8367\u5149\u5f71\u54cd\uff0c\u5219\u9700\u8981\u9009\u62e9BF33\u3002\u8f83\u597d\u7684\u5149\u5b66\u6027\u80fd\u8ba9\u5b83\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7cbe\u5bc6\u4eea\u5668\uff08\u5149\u5b66\u6ee4\u5149\u7247\uff09\u3001\u534a\u5bfc\u4f53\u6280\u672f\uff08\u6676\u7247\uff0c\u663e\u793a\u73bb\u7483\uff09\u3001\u533b\u5b66\u6280\u672f\u3001\u751f\u7269\u5de5\u7a0b\u3001\u5149\u5b66\u3001\u5149\u7535\u5b50\u5b66\u3001\u5149\u5b50\u5b66\u4ee5\u53ca\u5206\u6790\u8bbe\u5907\u7b49\u9886\u57df\u3002\n<\/p><\/blockquote>\n<hr \/>\n<h2>2. \u5f15\u8a00\u5206\u6790\ud83d\udcda\ud83d\udd2c<\/h2>\n<h3>2.1. \u5e94\u7528\u80cc\u666f<\/h3>\n<ul>\n<li><strong>\u5e94\u7528\u573a\u666f<\/strong>\uff1a\n<ul>\n<li>\u5728\u4e34\u5e8a\u8bca\u7597\u548c\u5fae\u521b\u624b\u672f\u8fc7\u7a0b\u4e2d\uff0c\u5bf9\u751f\u7269\u4f53\u5185\u7684\u538b\u529b\u8fdb\u884c\u6709\u9488\u5bf9\u6027\u7684\u6d4b\u91cf\uff0c\u53ef\u4ee5\u4e3a\u533b\u751f\u63d0\u4f9b\u5fc5\u8981\u7684\u8bca\u65ad\u4fe1\u606f\uff0c\u63d0\u4f9b\u51b3\u7b56\u652f\u6301\u548c\u6307\u5bfc\u6cbb\u7597\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u4ee5\u524d\u8bbe\u5907\u7684\u7f3a\u9677<\/strong>\uff1a\n<ul>\n<li>\u7136\u800c\u4f20\u7edf\u7684\u7535\u5b50\u4f20\u611f\u5668\u5f80\u5f80\u4f53\u79ef\u592a\u5927\uff0c\u4f1a\u589e\u52a0\u4f53\u5185\u6d4b\u91cf\u98ce\u9669\uff0c\u9020\u6210\u4e8c\u6b21\u611f\u67d3\uff0c\u540c\u65f6\u6d4b\u91cf\u7cbe\u5ea6\u4e5f\u4f1a\u53d7\u5230\u5176\u4ed6\u533b\u7597\u8bbe\u5907\u5f15\u8d77\u7684\u7535\u78c1\u5e72\u6270\u7684\u5f71\u54cd\uff0c\u4e0d\u80fd\u9002\u7528\u4e8e\u73b0\u4ee3\u5316\u7684\u533b\u7597\u9886\u57df<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6211\u4eec\u8bbe\u5907\u7684\u4f18\u70b9<\/strong>\uff1a\n<ul>\n<li>\u5149\u7ea4\u5f0f\u4f20\u611f\u5668\u56e0\u5176\u80fd\u6709\u6548\u907f\u514d\u7535\u78c1\u5e72\u6270\uff0c\u4e14\u4f53\u79ef\u5c0f\u3001\u7cbe\u5ea6\u9ad8\u3001\u751f\u7269\u517c\u5bb9\u6027\u5f3a\u7b49\u4f18\u70b9<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h3>2.2. \u5149\u7ea4\u538b\u529b\u4f20\u611f\u5668\u53d1\u5c55<\/h3>\n<details>\n<summary>\u5149\u7ea4\u538b\u529b\u4f20\u611f\u5668\u53d1\u5c55\u4e0e\u5e94\u7528<\/summary>\n<p>LINDSTROM L H \u4e8e 1970 \u5e74\u63d0\u51fa\u4e86\u7b2c\u4e00\u4e2a\u533b\u7528\u5149\u7ea4\u538b\u529b\u4f20\u611f\u5668\uff3b10\uff3d\u3002\u5728\u6b64\u540e\u7684 50 \u591a\u5e74\u6765\uff0c\u8d8a\u6765\u8d8a\u591a\u7684\u4eba\u5f00\u59cb\u91cd\u89c6\u5c0f\u578b\u5316\u5149\u7ea4\u4f20\u611f\u5668\u5728\u533b\u7597\u73af\u5883\u4e2d\u7684\u5e94\u7528\uff3b11\uff3d\u3002\u8fd1\u5e74\u6765\uff0c\u5546\u4e1a\u5316\u7684\u5149\u7ea4\u533b\u7597\u4f20\u611f\u5668\u5df2\u8fdb\u5165\u4e00\u5b9a\u89c4\u6a21\u7684\u5e02\u573a\uff0c\u5176\u4e2d\u5177\u6709\u4ee3\u8868\u6027\u7684\u662f\u52a0\u62ff\u5927 FISO \u516c\u53f8\u751f\u4ea7\u7684\u5fae\u578b\u5149\u7ea4\u4f20\u611f\u5668\uff0c\u53ef\u7528\u4e8e\u76d1\u6d4b\u5de6\u5fc3\u5ba4\u538b\u3001\u9885\u5185\u538b\u7b49\u53c2\u6570\uff0c\u5b9e\u9a8c\u8bc1\u660e\u8be5\u4f20\u611f\u5668\u4e0d\u4f1a\u5bf9\u4eba\u4f53\u9020\u6210\u4efb\u4f55\u4f24\u5bb3\uff3b12\uff0c 13\uff3d\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u7814\u7a76\u4eba\u5458\u4e5f\u5bf9\u5fae\u578b\u5149\u7ea4\u6cd5\u73c0\u538b\u529b\u4f20\u611f\u5668\u5728\u533b\u7597\u9886\u57df\u4e2d\u7684\u5e94\u7528\u5f00\u5c55\u4e86\u4e00\u7cfb\u5217\u5de5\u4f5c\uff3b14\uff3d\u3002GUO Xu \u7b49\uff3b15\uff3d\u5c06\u4e00\u5757 1.2 \u03bcm \u539a\u7684 SiO2\u819c\u7247\u70ed\u7c98\u5408\u5230\u5916\u5f84\u4e3a 125 \u03bcm\u7684\u8680\u523b\u5149\u7ea4\u7684\u7aef\u9762\u5f62\u6210\u6cd5\u73c0\u5e72\u6d89\u4eea\uff0c\u5b9e\u73b0\u4e86 12.4 nm\/kPa \u7684\u9759\u538b\u7075\u654f\u5ea6\u3002PODUVAL R K \u7b49\uff3b16\uff3d\u5c06 3 \u03bcm \u539a\u7684\u538b\u654f\u9694\u819c\u7c98\u63a5\u5728\u5e73\u51f8\u5fae\u900f\u955c\u8fdc\u7aef\u5f62\u6210\u5bc6\u95ed\u7684\u6cd5\u73c0\u8154\uff0c\u5b9e\u73b0\u6a21\u62df\u8840\u7ba1\u5185\u5fae\u538b\u6d4b\u91cf\uff0c\u8be5\u4f20\u611f\u5668\u68c0\u6d4b\u7cbe\u786e\u81f30.11 mmHg \u7684\u538b\u529b\u53d8\u5316\u3002LI Tianliang \u7b49\uff3b17\uff3d\u5728\u5149\u7ea4\u7aef\u9762\u5236\u4f5c\u5fae\u578b\u6c14\u6ce1\u4f5c\u4e3a\u6cd5\u73c0\u8154\uff0c\u4e14\u5728\u5149\u7ea4\u5185\u523b\u8680\u5e03\u62c9\u683c\u5149\u6805\u5b9e\u73b0\u6e29\u5ea6\u89e3\u8c03\uff0c\u5b9e\u73b0\u5fae\u521b\u624b\u672f\u538b\u529b\u68c0\u6d4b\uff0c\u8be5\u4f20\u611f\u5668\u7075\u654f\u5ea6\u4e3a 8.93 nm\/kPa\u3002<br \/>\n<\/details>\n<p><\/br><\/p>\n<p>\u4f46\u662f\u672c\u6587\u8ba4\u4e3a\uff0c\u8fd9\u4e9b\u5e74\u53d1\u5c55\u8bbe\u8ba1\u7684\u4f20\u611f\u5668\u90fd\u6709\u4e00\u4e2a\u95ee\u9898\uff1a<strong>\u4f9d\u8d56\u4e8e\u624b\u5de5\u5236\u4f5c\u6280\u672f\u7684\u4f20\u611f\u5668\u4e0d\u9002\u5408\u6279\u91cf\u751f\u4ea7\uff0c\u8fd9\u963b\u788d\u4e86\u5546\u4e1a\u5316\u5e94\u7528\u3002<\/strong><\/p>\n<p>\u8fd9\u4e5f\u6b63\u662f\u672c\u6587\u6240\u91c7\u7528\u7684\u8bbe\u8ba1\u5236\u4f5c\u65b9\u6cd5:<strong>\u76f8\u6bd4\u4e8e\u5355\u4e00\u5236\u5907\u7684\u5fae\u578b\u4f20\u611f\u5668\uff0c\u5229\u7528 MEMS \u6280\u672f\u4e0d\u4ec5\u53ef\u4ee5\u6ee1\u8db3\u5c0f\u4f53\u79ef\u7279\u5f81\uff0c\u540c\u65f6\u5b9e\u73b0\u4e86\u6279\u91cf\u5316\u751f\u4ea7\uff0c\u63d0\u9ad8\u4e86\u4f20\u611f\u5668\u7684\u4e00\u81f4\u6027\u3002<\/strong><br \/>\n\uff08\u4e5f\u6709\u524d\u4eba\u9a8c\u8bc1\u53ef\u884c\u6027\uff0c\u5e76\u6210\u529f\u5546\u4e1a\u5316\uff09<\/p>\n<hr \/>\n<h2>3. \u4f20\u611f\u5668\u8bbe\u8ba1\uff08\u6cd5\u5e03\u91cc-\u73c0\u7f57\uff09\ud83c\udfd7\ufe0f\ud83c\udf9b\ufe0f<\/h2>\n<h3>3.1. \u4f20\u611f\u5668\u7cfb\u7edf\u7ec4\u6210<\/h3>\n<p>\u6574\u4e2a\u4f20\u611f\u5668\u7cfb\u7edf\u7531<strong>\u5e26\u6709\u6cd5\u73c0\u8154\u7684\u538b\u529b\u4f20\u611f\u5668\u5143\u4ef6<\/strong>\u548c<strong>\u89e3\u8c03\u7cfb\u7edf<\/strong>\u7ec4\u6210\u3002<\/p>\n<blockquote><p>\n  \u5f53\u5916\u754c\u538b\u529b\u53d8\u5316\u65f6<strong>\u654f\u611f\u819c\u7247<\/strong>\u5728<strong>\u5916\u754c\u538b\u529b<\/strong>\u7684\u4f5c\u7528\u4e0b\u53d1\u751f<strong>\u53d8\u5f62<\/strong>\uff0c\u8fdb\u800c\u5bfc\u81f4<strong>\u6cd5\u73c0\u8154\u7684\u957f\u5ea6\u53d1\u751f\u53d8\u5316<\/strong>\uff0c\u901a\u8fc7\u5149\u7ea4\u5c06\u4fe1\u53f7\u4f20\u8f93\u5230<strong>\u89e3\u8c03\u7cfb\u7edf<\/strong>\uff0c\u8fdb\u800c<strong>\u786e\u5b9a\u5916\u90e8\u538b\u529b\u7684\u53d8\u5316<\/strong>\u3002\n<\/p><\/blockquote>\n<h3>3.2 \u4f20\u611f\u5668\u539f\u4ef6\u7ed3\u6784<\/h3>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u7ec4\u6210.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u7ec4\u6210.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u4f20\u611f\u5668\u539f\u4ef6\u7ed3\u6784\" \/><\/div><\/p>\n<div style=\"text-align: right;\">*\u91d1\u8272\u5e94\u4e3a\u51f9\u69fd\u5e95\u90e8\u6e85\u5c04\u91d1\u5c5e\u8584\u819c<\/div>\n<ul>\n<li><strong>\u7ec4\u6210<\/strong>\uff1a\n<ul>\n<li>\u7531\u5355\u6676\u7845\u3001BF33 \u73bb\u7483\u4ee5\u53ca\u591a\u6a21\u5149\u7ea4\u6784\u6210<\/li>\n<li>\u4f20\u611f\u5668\u7684\u6cd5\u73c0\u8154\u7531\u523b\u8680\u540e\u7684\u5355\u6676\u7845\u4e0e BF33 \u73bb\u7483\u771f\u7a7a\u9633\u6781\u952e\u5408\u5f62\u6210<\/li>\n<li>\u523b\u8680\u540e\u7684\u5355\u6676\u7845\u4f5c\u4e3a\u538b\u529b\u654f\u611f\u819c\u7247<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u5236\u4f5c\u5de5\u827a<\/strong>\uff1a\n<ul>\n<li>\u5229\u7528 MEMS\u6280\u672f\u6279\u91cf\u5236\u5907\u4e86\u7531\u7845\u6676\u5706\u5f62\u6210\u7684\u6cd5\u73c0\u8154\u9635\u5217\uff1b\u5176\u6b21\u57fa\u4e8e\u98de\u79d2\u5207\u5272\u6280\u672f\uff0c\u5206\u79bb\u5916\u5f84\u4ec5\u6709 400 \u03bcm \u7684\u5355\u4e2a\u4f20\u611f\u5934\uff1b\u6700\u540e\u901a\u8fc7\u663e\u5fae\u955c\u4e0b\u7684\u5fae\u4f4d\u79fb\u5e73\u53f0\u5c06\u591a\u6a21\u5149\u7ea4\u4e0e\u4f20\u611f\u5668\u7684\u6cd5\u73c0\u8154\u548c\u654f\u611f\u819c\u7247\u4e2d\u5fc3\u5bf9\u51c6\u7c98\u63a5<\/li>\n<\/ul>\n<\/li>\n<li>\u4f7f\u7528\u539f\u7406\uff1a\n<ul>\n<li>\u6cd5\u5e03\u91cc-\u73c0\u7f57\u5e72\u6d89\uff08\u8be6\u89c1\u4e0a\u6587\uff0c\u5df2\u5728\u9898\u76ee\u4e2d\u5206\u6790\uff09<br \/>\n> \u7531\u4e8e \u4ecb\u7ecd\u8005 \u4e0e \u4ecb\u7ecd\u76ee\u6807\u5bf9\u8c61 \u5747\u975e\u5149\u7535\u76f8\u5173\u4e13\u4e1a\uff0c\u6b64\u5904\u5177\u4f53\u539f\u7406\u4e0d\u7ec6\u8bb2<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u539f\u7406\u516c\u5f0f.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u539f\u7406\u516c\u5f0f.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u53c2\u8003\u516c\u5f0f\" \/><\/div><\/li>\n<\/ul>\n<\/li>\n<li>\u4f20\u611f\u5668\u9700\u6c42\u4e0e\u53c2\u6570\n<ul>\n<li>\u5149\u7ea4\u6cd5\u73c0\u4f20\u611f\u5668\u9700\u8981\u5177\u5907\u5c0f\u5c3a\u5bf8\u3001\u9ad8\u7075\u654f\u5ea6\u4ee5\u53ca\u4e00\u5b9a\u7684\u538b\u529b\u91cf\u7a0b<\/li>\n<li>\u6570\u503c\u6a21\u62df\u4eff\u771f\u5206\u6790\u7ed3\u679c\u5982\u4e0b<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u53c2\u6570\u4eff\u771f\u5206\u6790.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u53c2\u6570\u4eff\u771f\u5206\u6790.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u4f20\u611f\u5668\u53c2\u6570\u4eff\u771f\u5206\u6790\" \/><\/div><\/li>\n<li>\u53ef\u4ee5\u53d1\u73b0\uff1a<\/li>\n<li>\u968f\u7740\u539a\u5ea6\u7684\u589e\u52a0\uff0c\u7075\u654f\u5ea6\u9010\u6e10\u4e0b\u964d\uff0c\u4f46\u538b\u529b\u8303\u56f4\u9010\u6e10\u4e0a\u5347<\/li>\n<li>\u968f\u7740\u534a\u5f84\u7684\u589e\u52a0\uff0c\u7075\u654f\u5ea6\u9010\u6e10\u4e0a\u5347\uff0c\u4f46\u538b\u529b\u8303\u56f4\u9010\u6e10\u4e0b\u964d<\/li>\n<li>\u6240\u4ee5\u7efc\u5408\u8003\u8651\u9009\u62e9\u4e86\u5982\u4e0b\u53c2\u6570<br \/>\n<table>\n<thead>\n<tr>\n<th align=\"left\">\u53c2\u6570<\/th>\n<th align=\"center\">\u7b26\u53f7<\/th>\n<th align=\"center\">\u6570\u503c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td align=\"left\">\u819c\u7247\u534a\u5f84\/um<\/td>\n<td align=\"center\">r<\/td>\n<td align=\"center\">175<\/td>\n<\/tr>\n<tr>\n<td align=\"left\">\u819c\u7247\u539a\u5ea6\/um<\/td>\n<td align=\"center\">h<\/td>\n<td align=\"center\">4<\/td>\n<\/tr>\n<tr>\n<td align=\"left\">\u4f20\u611f\u5668\u76f4\u5f84\/um<\/td>\n<td align=\"center\">d<\/td>\n<td align=\"center\">400<\/td>\n<\/tr>\n<tr>\n<td align=\"left\">\u4f20\u611f\u5668\u957f\u5ea6\/um<\/td>\n<td align=\"center\">l<\/td>\n<td align=\"center\">220<\/td>\n<\/tr>\n<tr>\n<td align=\"left\">\u4f20\u611f\u5668\u538b\u529b\u8303\u56f4\/kPa<\/td>\n<td align=\"center\">P<\/td>\n<td align=\"center\">0~50<\/td>\n<\/tr>\n<tr>\n<td align=\"left\">\u4f20\u611f\u5668\u957f\u5ea6\/nm\/kPa<\/td>\n<td align=\"center\">S<\/td>\n<td align=\"center\">20<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\u603b\u7684\u6765\u8bf4\uff0c\u901a\u8fc7\u7cbe\u786e\u7684\u6a21\u62df\u548c\u5206\u6790\uff0c\u9009\u62e9\u9002\u5408\u7684\u654f\u611f\u819c\u7247\u548c\u7ed3\u6784\u53c2\u6570\uff0c\u4ee5\u6ee1\u8db3\u751f\u7269\u4f53\u5185\u76d1\u6d4b\u5bf9\u5c0f\u5c3a\u5bf8\u3001\u9ad8\u7075\u654f\u5ea6\u548c\u4e00\u5b9a\u538b\u529b\u91cf\u7a0b\u7684\u9700\u6c42\u3002\u8fd9\u4e3a\u672a\u6765\u5f00\u53d1\u66f4\u7cbe\u786e\u3001\u66f4\u53ef\u9760\u7684\u5149\u7ea4\u533b\u7597\u76d1\u6d4b\u8bbe\u5907\u5960\u5b9a\u4e86\u57fa\u7840\u3002<\/p>\n<hr \/>\n<h2>4. \u4f20\u611f\u5668\u5236\u5907\uff08MEMS\uff09\ud83c\udfed\ud83d\udd2c<\/h2>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u5236\u5907\u6d41\u7a0b.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u5236\u5907\u6d41\u7a0b.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u4f20\u611f\u5668\u5236\u5907\u6d41\u7a0b\" \/><\/div><\/p>\n<div style=\"text-align: right;\">*Silicon \u7845<\/div>\n<div style=\"text-align: right;\">*Oxide \u6c27\u5316\u7269<\/div>\n<div style=\"text-align: right;\">*Photoresist \u5149\u523b\u80f6<\/div>\n<div style=\"text-align: right;\">*Gold \u91d1<\/div>\n<div style=\"text-align: right;\">*Glass BF33\u73bb\u7483<\/div>\n<ul>\n<li>1\uff09\u5728 SOI \u7247\u539a\u5ea6\u4e3a 20 \u03bcm \u7684\u9876\u5c42\u7845\u9762\u4e0a\u5300\u80f6\u8fdb\u884c\u5149\u523b\u548c\u663e\u5f71\uff0c\u5f97\u5230\u6cd5\u73c0\u8154\u7684\u63a9\u819c\u56fe\u5f62\u3002150 \u2103\u575a\u819c\u540e\u7ecf\u8fc7\u523b\u8680\u673a\u5c06\u5f97\u5230\u7684\u63a9\u819c\u56fe\u5f62\u6df1\u7845\u523b\u8680 16 \u03bcm\u3002\u6b64\u65f6\u523b\u8680\u6df1\u5ea6\u4f5c\u4e3a\u4f20\u611f\u5668\u6cd5\u73c0\u8154\u7684\u521d\u59cb\u8154\u957f\uff0c\u5269\u4f59\u539a\u5ea6\u4e3a4 \u03bcm \u7684\u7845\u5219\u4f5c\u4e3a\u4f20\u611f\u5668\u7684\u654f\u611f\u819c\u7247\uff0c\u5982\u56fe 3\uff08a\uff09~\uff08b\uff09\u6240\u793a\uff1b<\/li>\n<li>2\uff09\u4f7f\u7528\u76f4\u6d41\u78c1\u63a7\u6e85\u5c04\u6280\u672f\u5728\u523b\u8680\u540e\u7684\u7845\u8868\u9762\u6e85\u5c04\u4e00\u5c42\u91d1\u819c\uff0c\u800c\u540e\u901a\u8fc7\u4e19\u916e\u6eb6\u6db2\u5c06\u56fe\u5f62\u4e4b\u5916\u591a\u4f59\u7684\u5149\u523b\u80f6\u5265\u79bb\u53bb\u9664\uff0c\u53ea\u7559\u4e0b\u8154\u5185\u7684\u91d1\u5c5e\u4f5c\u4e3a\u53cd\u5c04\u8584\u819c\uff0c\u5982\u56fe 3\uff08c\uff09~\uff08d\uff09\u6240\u793a\uff1b<\/li>\n<li>3\uff09\u5c06\u523b\u8680\u597d\u7684\u7845\u9762\u4e0e\u539a\u5ea6\u4e3a 200 \u03bcm \u7684\u53cc\u629b BF33 \u73bb\u7483\u9001\u5165\u9633\u6781\u952e\u5408\u673a\u771f\u7a7a\u952e\u5408\uff0c\u5728 4 \u5bf8\u952e\u5408\u7247\u4e0a\u5f62\u6210\u5bc6\u95ed\u7684\u771f\u7a7a\u6cd5\u73c0\u8154\u9635\u5217\uff0c\u5982\u56fe 3\uff08e\uff09\u6240\u793a\uff1b<\/li>\n<li>4\uff09\u6700\u540e\u5c06\u952e\u5408\u597d\u7684\u6676\u5706\u9001\u5165\u6df1\u7845\u523b\u8680\u673a\uff0c\u53cd\u65b9\u5411\u523b\u8680\u6389 SOI \u6676\u5706\u7684\u886c\u5e95\u5c42\u4e0e\u57cb\u6c27\u5c42\uff0c\u53ea\u7559\u4e0b\u5e26\u6709\u6cd5\u73c0\u8154\u7684\u9876\u5c42\u5355\u6676\u7845\u4f5c\u4e3a\u654f\u611f\u819c\u7247\uff0c\u6b64\u65f6\u952e\u5408\u7247\u603b\u539a\u5ea6\u8fbe\u5230 220 \u03bcm\uff0c\u5982\u56fe 3\uff08f\uff09~\uff08g\uff09\u6240\u793a\u3002<\/li>\n<\/ul>\n<p>\u6b64\u5916\uff0c\u5355\u4e2a\u4f20\u611f\u5668\u7684\u5236\u5907\u8fd8\u9700\u5305\u62ec\u4e09\u4e2a\u6b65\u9aa4\uff0c\u5206\u522b\u662f\u6fc0\u5149\u5207\u5272\u3001\u5149\u7ea4\u96c6\u6210\u4ee5\u53ca\u5c01\u88c5<\/p>\n<details>\n<summary>\u4f20\u611f\u5668\u7684\u5236\u5907\u5176\u5b83\u4e09\u4e2a\u6b65\u9aa4 <\/summary>\n<p>\u5229\u7528 MEMS \u6280\u672f\u5236\u5907\u7684\u5149\u7ea4\u6cd5\u73c0\u8154\u53ef\u4ee5\u5b9e\u73b0\u6279\u91cf\u5316\u751f\u4ea7\uff0c\u5e76\u4e14\u5177\u6709\u4f53\u79ef\u5c0f\u3001\u4e00\u81f4\u6027\u9ad8\u3001\u5236\u5907\u7b80\u5355\u3001\u7a33\u5b9a\u6027\u5f3a\u7b49\u4f18\u70b9\u3002\u4f20\u611f\u5668\u6cd5\u73c0\u8154\u6279\u91cf\u5316\u5236\u5907\u5728 4 \u5bf8\u6676\u5706\u540e\uff0c\u5355\u4e2a\u4f20\u611f\u5668\u7684\u5236\u5907\u8fd8\u9700\u5305\u62ec\u4e09\u4e2a\u6b65\u9aa4\uff0c\u5206\u522b\u662f\u6fc0\u5149\u5207\u5272\u3001\u5149\u7ea4\u96c6\u6210\u4ee5\u53ca\u5c01\u88c5\u3002\u9996\u5148\u4f7f\u7528\u8d85\u58f0\u6c2e\u5c04\u6d41\u8f85\u52a9\u6fc0\u5149\u5207\u5272\u82af\u7247\uff0c\u5b9e\u73b0\u4f20\u611f\u5668\u5355\u5143\u5206\u79bb\u5982\u56fe 4\uff08a\uff09\u6240\u793a\uff0c\u6b64\u65f6\u5355\u4e2a\u4f20\u611f\u5668\u6574\u4f53\u5916\u5f84\u4e3a 400 \u03bcm\uff0c\u9ad8\u5ea6\u4e3a 220 \u03bcm\uff0c\u4e14\u5207\u5272\u8868\u9762\u5e73\u6574\u5149\u6ed1\uff0c\u65e0\u660e\u663e\u7194\u878d\u7269\uff1b\u901a\u8fc7\u7d2b\u5916\u80f6\u5c06\u5206\u79bb\u540e\u7684\u4f20\u611f\u5934\u5728\u663e\u5fae\u955c\u4e0b\u7684\u5fae\u4f4d\u79fb\u5e73\u53f0\u4e0e\u591a\u6a21\u5149\u7ea4\u5bf9\u51c6\u7c98\u63a5\u56fa\u5316\u5982\u56fe 4\uff08b\uff09\u6240\u793a\uff1b\u6700\u540e\uff0c\u6234\u4e0a\u5916\u5f84\u4e3a 500 \u03bcm \u7684\u805a\u9170\u4e9a\u80fa\u5957\u7ba1\u8fdb\u884c\u5c01\u88c5\u4fdd\u62a4\uff0c\u8be5\u5957\u7ba1\u540c\u65f6\u6ee1\u8db3\u67d4\u8f6f\u3001\u751f\u7269\u517c\u5bb9\u3001\u5c0f\u4f53\u79ef\u7b49\u7279\u5f81\u5982\u56fe 4\uff08c\uff09\u6240\u793a\uff1b\u4f20\u611f\u5668\u65e0\u5c01\u88c5\u5b9e\u7269\u56fe\u548c\u4f20\u611f\u5668\u5149\u8c31\u56fe\u5982\u56fe 4\uff08d\uff09-\uff08e\uff09\u6240\u793a\u3002<\/p>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u5176\u5b83\u6b65\u9aa4.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u5176\u5b83\u6b65\u9aa4.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u4f20\u611f\u5668\u5176\u5b83\u6b65\u9aa4\" \/><\/div><\/p>\n<\/details>\n<ul>\n<li>\u4f20\u611f\u5668\u5149\u8c31\u56fe<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u5149\u8c31\u56fe.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u4f20\u611f\u5668\u5149\u8c31\u56fe.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u4f20\u611f\u5668\u5149\u8c31\u56fe\" \/><\/div><br \/>\n> \u7c7b\u4f3c\u6b63\u5f26\u51fd\u6570\u5ffd\u4e0a\u5ffd\u4e0b\u7684\u60c5\u51b5\uff0c\u5176\u5b9e\u6070\u4e0e\u524d\u6587\u5149\u5f3a\u516c\u5f0f\u76f8\u5bf9\u5e94\u3002\u8fd9\u4e2a\u7279\u6027\u4e5f\u6b63\u662f\u6211\u4eec\u8fdb\u884c\u538b\u529b\u68c0\u6d4b\u7684\u4f9d\u636e<br \/>\n-> \u53ef\u4ee5\u5f88\u660e\u663e\u7684\u89c2\u5bdf\u5230<strong>\u8c31\u7ebf\u968f\u95f4\u8dddL\u7684\u53d8\u5316<\/strong>\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>5. \u4f20\u611f\u5668\u6d4b\u8bd5\ud83e\uddea\ud83d\udcca<\/h2>\n<h3>5.1 \u89e3\u8c03\u65b9\u6cd5<\/h3>\n<ul>\n<li>\u8154\u957f\u5339\u914d\u6cd5\uff1a\u4ece\u5149\u6e90\u53d1\u51fa\u4e00\u675f\u5149\uff0c\u7ecf\u8fc7\u5149\u7ea4\u8026\u5408\u5668\u5230\u8fbe\u6cd5\u73c0\u8154\u4e2d\uff0c\u518d\u6b64\u53d1\u751f\u591a\u6b21\u53cd\u5c04\u5e76\u4ea7\u751f\u5e72\u6d89\u3002\n<ul>\n<li>\u6839\u636e\u524d\u6587\u63d0\u5230\u7684\u539f\u7406\uff0c\u5f53\u6709\u538b\u529b\u4f5c\u7528\u4e8e\u538b\u529b\u4f20\u611f\u5668\u65f6\uff0c\u95f4\u8dddL\u4f1a\u53d1\u751f\u5f62\u53d8\u5bfc\u81f4\u8ddd\u79bb\u53d8\u5316\uff0c\u56e0\u6b64\u5bf9\u5e94\u7684\u4ea7\u751f\u5e72\u6d89\u7684\u5149\u7684\u9891\u7387\u4e5f\u4f1a\u53d1\u751f\u76f8\u5e94\u53d8\u5316\uff0c\u6b64\u65f6\uff0c\u5149\u4e2d\u81ea\u7136\u800c\u7136\u5c31\u643a\u5e26\u4e86\u5173\u4e8e\u8154\u957f\u7684\u4fe1\u606f\uff08\u7ed3\u5408\u524d\u6587\u7684\u516c\u5f0f\uff0c\u76f8\u5f53\u4e8e\u643a\u5e26\u4e86\u538b\u529b\u7684\u4fe1\u606f\uff09\u3002<\/p>\n<\/li>\n<li>\n<p>\u90a3\u4e48\u5982\u4f55\u5c06\u4fe1\u606f\u89e3\u8c03\u51fa\u6765\uff1f\u901a\u8fc7\u5149\u7ea4\u8026\u5408\u5668\u7684\u53e6\u4e00\u7aef\u7684 SMA \u5149\u7ea4\u63a5\u5934\u63a5\u5165\u5149\u5b66\u6a21\u5757\u5185\u90e8\u3002SMA \u5149\u7ea4\u63a5\u5934\u7167\u5c04\u51fa\u6765\u7ecf\u8fc7\u51f9\u9762\u955c\uff08\u771f\u7684\u65f6\u51f9\u9762\u955c\u5417\uff1f\uff09\u7684\u6574\u578b\uff0c\u5706\u5f62\u5149\u6591\u88ab\u6574\u5f62\u6210\u4e00\u6bb5\u7ebf\u6027\u5149\u5e76\u805a\u96c6\u7167\u5c04\u5728\u5149\u6954\u4e0a\u3002<\/p>\n<\/li>\n<li>\n<p>\u90a3\u6b64\u65f6\uff0c\u663e\u7136\uff0c\u53ea\u6709<strong>\u5149\u6954\u67d0\u6bb5\u9ad8\u5ea6<\/strong>\u4e0e\u539f\u6765<strong>\u8154\u957f\u7684\u8ddd\u79bbL<\/strong>\u6210\u4e00\u5b9a\u5173\u7cfb\u65f6\uff0c\u624d\u80fd\u770b\u5230\u660e\u663e\u7684\u5149\uff08\u5728\u5149\u6954\u7684\u5185\u90e8\u80fd\u591f\u6784\u6210\u7b49\u539a\u5e72\u6d89\uff0c\u4f1a\u5728\u5bf9\u5e94\u4f4d\u7f6e\u51fa\u73b0\u5e72\u6d89\u4fe1\u53f7\u7684\u5149\u5f3a\u6700\u5927\u503c\uff09\u3002<\/p>\n<\/li>\n<li>\n<p>\u6700\u540e\uff0c\u518d\u901a\u8fc7\u56fe\u50cf\u4f20\u611f\u5668\u5c06\u5e72\u6d89\u5149\u4fe1\u53f7\u8f6c\u5316\u6210\u6a21\u62df\u4fe1\u53f7\uff0c\u518d\u7ecf\u8fc7\u540e\u7eed\u89e3\u8c03\u7535\u8def\u7684\u5904\u7406\u6765\u89e3\u7b97\u51fa\u8154\u957f -> \u7b49\u4ef7\u4e8e\u8ba1\u7b97\u51fa\u538b\u529b<\/p>\n<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u57fa\u4e8e\u83f2\u7d22\u7684\u5149\u7ea4\u6cd5\u73c0\u89e3\u8c03\u7cfb\u7edf.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u57fa\u4e8e\u83f2\u7d22\u7684\u5149\u7ea4\u6cd5\u73c0\u89e3\u8c03\u7cfb\u7edf.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u57fa\u4e8e\u83f2\u7d22\u7684\u5149\u7ea4\u6cd5\u73c0\u89e3\u8c03\u7cfb\u7edf\" \/><\/div><\/p>\n<h3>5.2 \u4f20\u611f\u5668\u9759\u6001\u6d4b\u8bd5<\/h3>\n<h4>5.2.1 \u6d4b\u8bd5\u5e73\u53f0<\/h4>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6d4b\u8bd5\u5e73\u53f0.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6d4b\u8bd5\u5e73\u53f0.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u6d4b\u8bd5\u5e73\u53f0\" \/><\/div><\/p>\n<ul>\n<li>\u7ec4\u6210\uff1a\n<ul>\n<li>\u53f3\u8fb9\u7684\u4e09\u6837\u8bbe\u5907\uff0c\u7528\u6765\u7cbe\u786e\u63a7\u5236\u4f20\u611f\u5668\u6536\u5230\u7684\u538b\u529b\uff1b<\/li>\n<li>\u4e2d\u95f4\u7684\u8bbe\u5907\u786e\u4fdd\u538b\u529b\u7684\u68c0\u6d4b\u4e0e\u4f20\u611f\u7a33\u5b9a\u4e14\u51c6\u786e\uff1b<\/li>\n<li>\u5de6\u8fb9\u7684\u8bbe\u5907\u68c0\u6d4b\u5f53\u524d\u5bf9\u5e94\u7684\u538b\u529b\u7ed3\u679c\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h4>5.2.2 \u7a33\u5b9a\u6027\u6d4b\u8bd5<\/h4>\n<ul>\n<li>\u6d4b\u8bd5\u65b9\u6cd5\uff1a\n<ul>\n<li>\u521d\u59cb\u538b\u5f3a\u4e3a 0 kPa\uff1b<\/li>\n<li>\u4ece 0 Kpa \u5f00\u59cb\uff0c\u4ee5 10 KPa \u4e3a\u6b65\u957f\uff0c\u6bcf\u4e00\u538b\u529b\u4fdd\u6301 60 min\uff1b<\/li>\n<li>\u5176\u4e2d\u6bcf 10 min \u8bb0\u5f55\u4e00\u6b21\u8154\u957f\u3002<\/li>\n<\/ul>\n<\/li>\n<li>\u6d4b\u8bd5\u7ed3\u679c\uff1a\n<ul>\n<li>\u5728\u538b\u529b\u4fdd\u6301\u6052\u5b9a\u7684\u6761\u4ef6\u4e0b\uff0c\u8154\u957f\u6f02\u79fb\u91cf\u5c0f\u4e8e 2 nm\uff0c\u76f8\u5f53\u4e8e 0.108 kPa \u538b\u529b\u4ea7\u751f\u5f62\u53d8\u91cf\uff0c\u5177\u6709\u826f\u597d\u7684\u7a33\u5b9a\u6027\u3002<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u7a33\u5b9a\u6027\u6d4b\u8bd5.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u7a33\u5b9a\u6027\u6d4b\u8bd5.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u7a33\u5b9a\u6027\u6d4b\u8bd5\" \/><\/div><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h4>5.2.3 \u7075\u654f\u5ea6\u6d4b\u8bd5<\/h4>\n<ul>\n<li>\u6d4b\u8bd5\u65b9\u6cd5\uff1a\n<ul>\n<li>\u521d\u59cb\u538b\u5f3a\u4e3a 0 Kpa\uff1b<\/li>\n<li>\u6b65\u957f\u4e3a 3.3 Kpa\uff0c\u4e0a\u9650 50 Kpa\uff1b<\/li>\n<li>\u6bcf\u6b21\u8bb0\u5f55\u8154\u957f<\/li>\n<\/ul>\n<\/li>\n<li>\u6d4b\u8bd5\u7ed3\u679c\uff1a\n<ul>\n<li>\u4f20\u611f\u5668\u7075\u654f\u5ea6\u4e3a 18.5 nm\/kPa\uff0c\u4e0e\u7406\u8bba\u8bbe\u8ba1 20.0 nm\/kPa\u57fa\u672c\u543b\u5408\u3002\u4ea7\u751f\u7684\u7075\u654f\u5ea6\u8bef\u5dee\u7531\u4e8e\u654f\u611f\u819c\u7247\u523b\u8680\u4e0d\u5747\u5300\u5bfc\u81f4\u3002\u5bf9\u8bb0\u5f55\u7684\u538b\u529b\u6570\u636e\u8fdb\u884c\u7ebf\u6027\u62df\u5408\uff0c\u5f97\u5230\u4f20\u611f\u5668\u7684\u6700\u5927\u975e\u7ebf\u6027\u5ea6\u4e3a 0.47% F.S.\u3002<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u7075\u654f\u5ea6\u6d4b\u8bd5.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u7075\u654f\u5ea6\u6d4b\u8bd5.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u7075\u654f\u5ea6\u6d4b\u8bd5\" \/><\/div><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h4>5.2.4 \u8fdf\u6ede\u91cd\u590d\u6027\u6d4b\u8bd5<\/h4>\n<ul>\n<li>\u6d4b\u8bd5\u65b9\u6cd5\uff1a\n<ul>\n<li>\u521d\u59cb\u538b\u5f3a\u4e3a 0 Kpa\uff1b<\/li>\n<li>\u6b65\u957f\u4e3a 3.3 Kpa\uff0c\u4e0a\u9650 50 Kpa\uff1b<\/li>\n<li>\u6bcf\u6b21\u8bb0\u5f55\u8154\u957f<\/li>\n<li>\u4ee5\u540c\u6837\u6b65\u957f\u964d\u538b\u81f3 0 kPa\uff0c\u91cd\u590d\u4e09\u6b21<\/li>\n<\/ul>\n<\/li>\n<li>\u6d4b\u8bd5\u7ed3\u679c\uff1a\n<ul>\n<li>\u4f20\u611f\u5668\u91cd\u590d\u6027\u4e3a 0.18%\uff0c\u8fdf\u6ede\u4e3a 0.18%<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u8fdf\u6ede&amp;\u91cd\u590d\u6027\u6d4b\u8bd5.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u8fdf\u6ede&amp;\u91cd\u590d\u6027\u6d4b\u8bd5.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u8fdf\u6ede&amp;\u91cd\u590d\u6027\u6d4b\u8bd5\" \/><\/div><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h4>5.2.5 \u6db2\u4f53\u73af\u5883\u4e2d\u7684\u6e29\u5ea6\u4ea4\u53c9\u7075\u654f\u5ea6<\/h4>\n<ul>\n<li>\u7f18\u7531\uff1a\n<ul>\n<li>\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6a21\u62df\u4eba\u4f53\u73af\u5883<\/li>\n<\/ul>\n<\/li>\n<li>\u6d4b\u8bd5\u65b9\u6cd5\uff1a\n<ul>\n<li>\u5c06\u4f20\u611f\u5668\u653e\u5165\u6e29\u5ea6\u4e3a 43 \u2103\u7684\u751f\u7406\u76d0\u6c34\u4e2d<\/li>\n<li>\u4ee5 0.5 kPa \u4e3a\u6b65\u957f\uff0c\u5411\u6db2\u4f53\u5185\u589e\u52a0\u538b\u529b\u5230 5 kPa\uff08\u4e00\u822c\u4eba\u4f53\u5185\u538b\u529b\u8303\u56f4 0~5 kPa\uff09<\/li>\n<li>\u8bb0\u5f55\u6bcf\u4e2a\u70b9\u6570\u503c\uff0c\u7136\u540e\u7b49\u5f85\u6c34\u6e29\u81ea\u7136\u4e0b\u964d\u523036 \u2103\uff0c\u6c34\u6e29\u6bcf\u9694 1 \u2103\u91cd\u590d\u6b64\u8fc7\u7a0b<\/li>\n<\/ul>\n<\/li>\n<li>\u6d4b\u8bd5\u7ed3\u679c\uff1a\n<ul>\n<li>\u4f20\u611f\u5668\u5728\u6b63\u5e38\u4eba\u4f53\u6e29\u5ea6\u4e0b\u7684\u6db2\u4f53\u5de5\u4f5c\u73af\u5883\u4e2d\u521d\u59cb\u8154\u957f\u6e29\u5ea6\u6f02\u79fb\u91cf\u4e3a 5 nm\/\u2103\uff0c\u5e76\u4e14\u5728\u6b64\u6e29\u5ea6\u533a\u95f4\u8303\u56f4\u5185\u4f20\u611f\u5668\u7684\u538b\u529b\u7075\u654f\u5ea6\u6700\u5927\u5dee\u503c\u5c0f\u4e8e 0.4 nm\/Kpa\uff0c\u56e0\u6b64\u4eba\u4f53\u7684\u6e29\u5ea6\u53d8\u5316\u4e0d\u4f1a\u5bf9\u4f20\u611f\u5668\u6027\u80fd\u4ea7\u751f\u8f83\u5927\u5e72\u6270\u3002<br \/>\n<div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6db2\u4f53\u73af\u5883\u4e2d\u7684\u6e29\u5ea6\u4ea4\u53c9\u7075\u654f\u5ea6.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u6db2\u4f53\u73af\u5883\u4e2d\u7684\u6e29\u5ea6\u4ea4\u53c9\u7075\u654f\u5ea6.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u6db2\u4f53\u73af\u5883\u4e2d\u7684\u6e29\u5ea6\u4ea4\u53c9\u7075\u654f\u5ea6\" \/><\/div><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>6. \u7ed3\u8bba\u2705\ud83d\udccc<\/h2>\n<p><div class='fancybox-wrapper lazyload-container-unload' data-fancybox='post-images' href='https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u7ed3\u8bba.png'><img class=\"lazyload lazyload-style-1\" src=\"data:image\/svg+xml;base64,PCEtLUFyZ29uTG9hZGluZy0tPgo8c3ZnIHdpZHRoPSIxIiBoZWlnaHQ9IjEiIHhtbG5zPSJodHRwOi8vd3d3LnczLm9yZy8yMDAwL3N2ZyIgc3Ryb2tlPSIjZmZmZmZmMDAiPjxnPjwvZz4KPC9zdmc+\"  decoding=\"async\" data-original=\"https:\/\/blog.keruone.cn\/wp-content\/uploads\/2025\/03\/\u7ed3\u8bba.png\" src=\"data:image\/png;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAAAXNSR0IArs4c6QAAAARnQU1BAACxjwv8YQUAAAAJcEhZcwAADsQAAA7EAZUrDhsAAAANSURBVBhXYzh8+PB\/AAffA0nNPuCLAAAAAElFTkSuQmCC\" alt=\"\u7ed3\u8bba\" \/><\/div><\/p>\n<hr \/>\n<h2>7. \u53ef\u80fd\u7f3a\u5c11\u7684\uff1f \ud83e\udd14\u2753<\/h2>\n<ul>\n<li>\u6ca1\u6709\u8003\u8651\u808c\u8089\u538b\u529b\u3001\u5176\u5b83\u6210\u5206\u538b\u529b\n<ul>\n<li>\u5b9e\u9645\u5e94\u7528\u4e2d\u5f88\u96be\u8bf4\u53ea\u4f1a\u6709\u6db2\u4f53\u6216\u6c14\u4f53\u7684\u538b\u529b\u5427<\/li>\n<\/ul>\n<\/li>\n<li>\u6ca1\u6709\u8003\u8651\u53d7\u529b\u4e0d\u5747\u5300\u7684\u7ed3\u679c\n<ul>\n<li>\u600e\u4e48\u53ef\u80fd\u5b9e\u9645\u4f7f\u7528\u529b\u662f\u5747\u5300\u7684\u5462\uff1f<\/li>\n<\/ul>\n<\/li>\n<li>\u6ca1\u6709\u751f\u7269\u5b9e\u9645\u6d4b\u8bd5\n<ul>\n<li>\u7ed9\u751f\u7269\u3001\u533b\u5b66\u4f7f\u7528\uff0c\u8fd9\u4e9b\u600e\u80fd\u6ca1\u6709\u5462\uff1f<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6279\u91cf\u5236\u9020\u4e00\u81f4\u6027\u5206\u6790<\/strong>\n<ul>\n<li>\u672c\u6587\u6700\u91cd\u8981\u7684\u4e00\u4e2a\u7279\u70b9\u5c31\u662f\u53ef\u6279\u91cf\u751f\u4ea7\uff0c\u4f46\u662f\u5173\u4e8e\u6b64\u7684\u68c0\u6d4b\u76f8\u5173\u6ca1\u6709\uff0c\u53ea\u6709\u7ed3\u8bba\u4e2d\u7684\u4e00\u53e5\u4e0d\u6e05\u4e0d\u695a\u7684\u8bdd<\/li>\n<\/ul>\n<\/li>\n<li>\u7834\u5316\u6027\u6d4b\u8bd5\u6709\u65e0\uff1f\n<ul>\n<li>\u5546\u4e1a\u7528\u54c1\u603b\u4e0d\u80fd\u968f\u968f\u4fbf\u4fbf\u5c31\u574f\u4e86\u5427<\/li>\n<\/ul>\n<\/li>\n<li>\u957f\u671f\u7a33\u5b9a\u6027\u4e0e\u53ef\u9760\u6027\u6d4b\u8bd5\n<ul>\n<li>\u6bd5\u7adf\u5982\u679c\u80fd\u957f\u671f\u4f7f\u7528\u8c01\u4f1a\u5e0c\u671b\u66f4\u6362\u8fc7\u4e8e\u5e73\u51e1\u5462\uff1f<\/li>\n<li>\uff08\u4f46\u4e5f\u6709\u53ef\u80fd\u8003\u8651\u5230\u751f\u7406\u5b89\u5168\u3001\u75be\u75c5\u4f20\u64ad\u7b49\u6210\u4e3a\u4e00\u6b21\u6027\u7528\u54c1\uff09<\/li>\n<\/ul>\n<\/li>\n<li>\u5728\u5176\u5b83\u65b9\u9762\u6709\u65e0\u53ef\u80fd\u7528\u9014\uff1f<\/li>\n<li>&#8230;<\/li>\n<\/ul>\n<blockquote><p>\n  \u867d\u7136\u4e0a\u8ff0\u6709\u4e9b\u95ee\u9898\u786e\u5b9e\u4e0d\u662f\u4e00\u4e2a\u7814\u7a76\u578b\u8bba\u6587\u8be5\u6709\u7684\u63d0\u95ee\uff0c\u4f46\u786e\u5b9e\u4e5f\u662f\u53ef\u4ee5\u8003\u8651\u7684\n<\/p><\/blockquote>\n<hr \/>\n<h2>8. \u4ec0\u4e48\u662f\u79d1\u7814\uff1f\u2014\u2014\u5bf9\u79d1\u7814\u7684\u63a2\u8ba8\ud83c\udf93\ud83d\udd0d<\/h2>\n<blockquote><p>\n  \u89c2\u70b9\u662f\u6211\u7684\uff0c\u4f46\u662f\u5185\u5bb9\u662f\u8ba9AI\u6da6\u8272\u586b\u5145\u7684<br \/>\n  <!-- \u4f60\u53d1\u73b0\u4e86\u522b\u4eba\u6ca1\u53d1\u73b0\u7684\u4e8b\u3001\u4f60\u5c1d\u8bd5\u4e86\u522b\u4eba\u6ca1\u60f3\u5230\u7684\u7ec4\u5408...\n  \u4e0d\u4e00\u5b9a\u662f\u539f\u7406\u662f\u591a\u4e48\u7684\u65b0\u9896\u624d\u7b97\u79d1\u7814\uff0c\u4e0d\u4e00\u5b9a\u662f\u591a\u4e48\u9ad8\u8d85\u7684\u6027\u80fd\u624d\u7b97\u79d1\u7814... -->\n<\/p><\/blockquote>\n<p>\u79d1\u7814\u4e0d\u662f\u9ad8\u4e0d\u53ef\u6500\u7684\u8c61\u7259\u5854\uff0c\u4e5f\u4e0d\u662f\u53ea\u6709\u5929\u624d\u624d\u80fd\u6d89\u8db3\u7684\u5723\u5730\u3002\u4f60\u4e0d\u4e00\u5b9a\u8981\u63d0\u51fa\u60ca\u5929\u52a8\u5730\u7684\u65b0\u7406\u8bba\uff0c\u6216\u8005\u9020\u51fa\u8d85\u8d8a\u65f6\u4ee3\u7684\u9ed1\u79d1\u6280\uff0c\u624d\u80fd\u79f0\u4e4b\u4e3a\u79d1\u7814\u3002\ud83e\udd13\u2728<\/p>\n<p>\u6216\u8bb8\u4f60\u53d1\u73b0\u4e86\u522b\u4eba\u6ca1\u6ce8\u610f\u5230\u7684\u73b0\u8c61\uff0c\u6216\u8bb8\u4f60\u5c1d\u8bd5\u4e86\u4e00\u4e2a\u4ece\u6ca1\u4eba\u60f3\u5230\u7684\u7ec4\u5408\uff0c\u6216\u8bb8\u4f60\u7528\u65b0\u7684\u89d2\u5ea6\u89e3\u8bfb\u4e86\u5df2\u6709\u7684\u77e5\u8bc6\u2026\u2026\u8fd9\u4e9b\u90fd\u53ef\u4ee5\u662f\u79d1\u7814\uff01\ud83d\udd0d\ud83d\udd04<\/p>\n<p>\u79d1\u7814\u7684\u672c\u8d28\u662f\u63a2\u7d22\u4e0e\u521b\u65b0\uff0c\u800c\u4e0d\u662f\u8ffd\u6c42\u201c\u9707\u60ca\u4e16\u754c\u201d\u7684\u5927\u7a81\u7834\u3002\u4e0d\u8981\u56e0\u4e3a\u201c\u81ea\u5df1\u4e0d\u591f\u806a\u660e\u201d\u6216\u8005\u201c\u7814\u7a76\u4e0d\u591f\u91cd\u5927\u201d\u800c\u80c6\u602f\uff01\ud83d\ude24\ud83d\ude80 \u4efb\u4f55\u4e00\u4e2a\u5c0f\u5c0f\u7684\u6539\u8fdb\uff0c\u4efb\u4f55\u4e00\u4e2a\u7075\u5149\u4e00\u73b0\u7684\u60f3\u6cd5\uff0c\u90fd\u53ef\u80fd\u662f\u79d1\u7814\u7684\u79cd\u5b50\u3002\ud83c\udf31\ud83d\udca1<\/p>\n<p>\u52c7\u6562\u53bb\u8bd5\uff01\u5927\u80c6\u53bb\u60f3\uff01\u54ea\u6015\u53ea\u662f\u8fc8\u51fa\u4e00\u5c0f\u6b65\uff0c\u4f60\u4e5f\u5728\u62d3\u5c55\u672a\u77e5\u7684\u8fb9\u754c\u3002\u672a\u6765\u7684\u67d0\u4e00\u5929\uff0c\u4f60\u7684\u63a2\u7d22\u53ef\u80fd\u4f1a\u6210\u4e3a\u522b\u4eba\u7814\u7a76\u7684\u57fa\u77f3\uff01\ud83d\udcda\ud83d\udd2c\ud83d\udc96<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u8bba\u6587&amp;\u7f51\u5740\ud83d\udcd6\ud83d\udd17<\/h2>\n<ul>\n<li><a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/kns.cnki.net\/kcms2\/article\/abstract?v=52O9CKbg8L7QNlkCdwmn_sd-IH-mT0u8WZx6gYP17Q2WTg4DtBYI1o5WcaZAqehV-GH4H5-Se6ijwUCtBir_mnLXULXZtc2fB5SNAfk8PTYtiQSzkTAS3WNrq3X7xNZkb8YZNyEc2bHribGrHBQkRpHCgkvi4-eRp99dssnlGkP2xoYCV7T0I5w7Jw0QxfGi&amp;uniplatform=NZKPT&amp;language=CHS\">\u674e\u6587\u8c6a,\u8d3e\u5e73\u5c97,\u738b\u519b,\u7b49.\u57fa\u4e8e\u7845MEMS\u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668[J].\u5149\u5b50\u5b66\u62a5,2024,53(05):154-162.<\/a><\/li>\n<li><a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/zhuanlan.zhihu.com\/p\/412962981\">MEMS\u539f\u7406<\/a><\/li>\n<li><a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/zhuanlan.zhihu.com\/p\/579184206\">\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8c10\u632f\u8154\u5de5\u4f5c\u539f\u74061<\/a><\/li>\n<li><a class=\"wp-editor-md-post-content-link\" href=\"https:\/\/www.zhihu.com\/question\/56707047\">\u6cd5\u5e03\u91cc-\u73c0\u7f57\u8c10\u632f\u8154\u5de5\u4f5c\u539f\u74062<\/a><\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>\u57fa\u4e8e\u7845 MEMS \u6280\u672f\u7684\u9ad8\u7075\u654f\u5ea6\u5fae\u578b\u5149\u7ea4\u6cd5\u5e03\u91cc-\u73c0\u7f57\u538b\u529b\u4f20\u611f\u5668\ud83c\udf9b\ufe0f\ud83d\udce1 [1]\u674e\u6587\u8c6a,\u8d3e\u5e73\u5c97,\u738b\u519b,\u7b49.\u57fa\u4e8e\u7845M [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-334","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"jetpack_featured_media_url":"","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/posts\/334","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/comments?post=334"}],"version-history":[{"count":7,"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/posts\/334\/revisions"}],"predecessor-version":[{"id":342,"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/posts\/334\/revisions\/342"}],"wp:attachment":[{"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/media?parent=334"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/categories?post=334"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.keruone.cn\/index.php\/wp-json\/wp\/v2\/tags?post=334"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}